Semiconductor device with patterned ground shielding

ABSTRACT

Semiconductor devices and methods of formation are provided herein. A semiconductor device includes a first inductor, a patterned ground shielding (PGS) proximate the first inductor comprising one or more portions and a first switch configured to couple a first portion of the PGS to a second portion of the PGS. The semiconductor device also has a configuration including a first inductor on a first side of the PGS, a second inductor on a second side of the PGS and a first switch configured to couple a first portion of the PGS to a second portion of the PGS. Selective coupling of portions of the PGS by activating or deactivating switches alters the behavior of the first inductor, or the behavior and interaction between the first inductor and the second inductor. A mechanism is thus provided for selectively configuring a PGS to control inductive or other properties of a circuit.

BACKGROUND

Inductors are used in electronic circuits to function as, among otherthings, filters or transformers.

DESCRIPTION OF THE DRAWINGS

Aspects of the disclosure are understood from the following detaileddescription when read with the accompanying drawings. It will beappreciated that elements and/or structures of the drawings are notnecessarily be drawn to scale. Accordingly, the dimensions of thevarious features may be arbitrarily increased and/or reduced for clarityof discussion.

FIG. 1 is a flow diagram illustrating a method of forming asemiconductor device, according to some embodiments.

FIG. 2 is a flow diagram illustrating a method of forming asemiconductor device, according to some embodiments.

FIG. 3 is a flow diagram illustrating a method of forming asemiconductor device, according to some embodiments.

FIG. 4 is an illustration of a semiconductor device, according to someembodiments.

FIG. 5 is an illustration of a semiconductor device, according to someembodiments.

FIG. 6 is an illustration of a semiconductor device, according to someembodiments.

FIG. 7 is an illustration of a semiconductor device, according to someembodiments.

FIG. 8 is an illustration of a semiconductor device, according to someembodiments.

FIG. 9 is an illustration of a semiconductor device, according to someembodiments.

FIG. 10 is an illustration of a semiconductor device, according to someembodiments.

FIG. 11 is an illustration of a semiconductor device, according to someembodiments.

FIG. 12 is an illustration of a semiconductor device, according to someembodiments.

FIG. 13 is an illustration of a semiconductor device, according to someembodiments.

FIG. 14 is an illustration of a semiconductor device, according to someembodiments.

FIG. 15 is an illustration of a semiconductor device, according to someembodiments.

FIG. 16 is an illustration of a semiconductor device, according to someembodiments.

FIG. 17 is an illustration of a semiconductor device, according to someembodiments.

FIG. 18 is an illustration of a semiconductor device, according to someembodiments.

FIG. 19 is an illustration of a semiconductor device, according to someembodiments.

FIG. 20 is an illustration of a semiconductor device, according to someembodiments.

FIG. 21 is an illustration of a semiconductor device, according to someembodiments.

FIG. 22 is an illustration of a semiconductor device, according to someembodiments.

FIG. 23 is an illustration of a semiconductor device, according to someembodiments.

FIG. 24 is an illustration of a semiconductor device, according to someembodiments.

FIG. 25 is an illustration of a semiconductor device, according to someembodiments.

FIG. 26 is an illustration of a semiconductor device, according to someembodiments.

FIG. 27 is an illustration of a semiconductor device, according to someembodiments.

FIG. 28 is an illustration of a semiconductor device, according to someembodiments.

FIG. 29 is an illustration of a semiconductor device, according to someembodiments.

FIG. 30 is an illustration of a semiconductor device, according to someembodiments.

FIG. 31 is an illustration of a semiconductor device, according to someembodiments.

FIG. 32 is an illustration of a semiconductor device, according to someembodiments.

FIG. 33 is an illustration of a semiconductor device, according to someembodiments.

FIG. 34 is an illustration of a semiconductor device, according to someembodiments.

FIG. 35 is an illustration of a semiconductor device, according to someembodiments.

FIG. 36 is an illustration of a semiconductor device, according to someembodiments.

FIG. 37 is an illustration of a semiconductor device, according to someembodiments.

FIG. 38 is an illustration of a semiconductor device, according to someembodiments.

FIG. 39 is an illustration of a semiconductor device, according to someembodiments.

FIG. 40 is an illustration of a semiconductor device, according to someembodiments.

FIG. 41 is an illustration of a semiconductor device, according to someembodiments.

FIG. 42 is an illustration of a semiconductor device, according to someembodiments.

FIG. 43 is an illustration of a semiconductor device, according to someembodiments.

FIG. 45 is an illustration of a semiconductor device, according to someembodiments.

FIG. 46 is an illustration of a semiconductor device, according to someembodiments.

DETAILED DESCRIPTION

The claimed subject matter is now described with reference to thedrawings, wherein like reference numerals are generally used to refer tolike elements throughout. In the following description, for purposes ofexplanation, numerous specific details are set forth in order to providean understanding of the claimed subject matter. It is evident, however,that the claimed subject matter may be practiced without these specificdetails. In other instances, structures and devices are illustrated inblock diagram form in order to facilitate describing the claimed subjectmatter.

A semiconductor device comprising a first inductor, a patterned groundshielding (PGS) comprising one or more portions, and a first switchconfigured to couple a first portion of the PGS to a second portion ofthe PGS, as provided herein, is useful for various purposes, such as toinduce variable inductance or form an RF choke for use in 3D integratedcircuits. In some embodiments, the semiconductor device comprises atleast one of a first inductor or a second inductor. In some embodiments,the PGS is situated between the first inductor and the second inductor.In some embodiments, the semiconductor device comprises at least one ofa first substrate or a second substrate. In some embodiments, the PGS issituated between the second substrate and the second inductor. In someembodiments, the PGS is situated between the first substrate and thefirst inductor. In some embodiments, the PGS is situated between thefirst substrate and the second substrate. In some embodiments, thesemiconductor device comprises at least one of a first switch or asecond switch. In some embodiments, the first switch is not situatedbetween the inductor and the PGS. In some embodiments, the first switchis situated in at least one of the first substrate or the secondsubstrate. In some embodiments, the first switch is connected to thefirst portion of the PGS by a conductive element. In some embodiments, aswitch comprises a conductive material. In some embodiments, theconductive material is metal. In some embodiments, the connectiveelement passes through the second substrate.

One or more arraignments of a semiconductor device are provided herein.In some embodiments, a first switch is coupled to a first portion of aPGS. In some embodiments, a second switch is selectively coupled to asecond portion of the PGS. In some embodiments, the first switch isselectively activated to alter the performance of at least one of afirst inductor or a second inductor. In some embodiments, at least oneof the first switch or second switch is connected to a voltage source.In some embodiments, the voltage source comprises ground. In someembodiments, selectively activating the first switch isolates a firstfrequency. In some embodiments, selectively activating the second switchisolates a second frequency. In some embodiments, the first frequency isa high frequency. In some embodiments, the second frequency is a lowfrequency. In some embodiments, selectively activating the first switchalters the behavior of an inductor to address process variations in theinductor.

In some embodiments, a first inductor is on a first side of a PGS and afirst switch, and a second inductor is on a second side of the PGS andthe first switch, and the first switch is configured to couple a firstportion of the PGS to a second portion of a the PGS. In someembodiments, the first switch is connected to a voltage source. In someembodiments, the voltage source comprises ground. In some embodiments,the first inductor and second inductor form a transformer. In someembodiments, the application of the voltage source to at least some ofthe PGS through the first switch affects the behavior of thetransformer.

A first method 100 of forming a first semiconductor device 500 isillustrated in FIG. 1, and one or more semiconductor arraignments formedby such methodology are illustrated in FIGS. 4-19. As illustrated inFIG. 19, the first semiconductor device 500 comprises one or moreportions of a patterned ground shielding (PGS) 528, a first inductor 504on a first side of the PGS 528, a second inductor 532 on a second sideof the PGS 528 and a first switch 516 coupled to a first portion of PGS528. Turning to FIG. 4, a first semiconductor composite 550 comprising afirst substrate 502, a first dielectric layer 503 and a first inductor504 embedded in the first dielectric layer 503 is illustrated.

At 102, the first inductor 504 is formed in the first dielectric layer503, as illustrated in FIG. 4. In some embodiments, the first inductor504 is formed by creating a trench in the first dielectric layer 503,such as by etching, and at least one of depositing or growing aconductive material in the trench. In some embodiments, additionaldielectric is then formed over the first inductor 504, such as by atleast one of growth or deposition. In some embodiments, the firstdielectric layer 503, including the additional dielectric formed overthe first inductor 504 and thus also the intervening first inductor 504,has a thickness of between about 2.0 μm to about 8.0 μm. In someembodiments, the first dielectric layer 503 comprises at least one ofsilicon oxide (SiO₂) or silicon nitride (Si₃N-₄). In some embodiments,the first dielectric layer 503 comprises an inter-layer dielectric(ILD), an inter-metal dielectric, or an undoped silicon glass (USG)layer. In some embodiments, the first inductor 504 has a thickness ofbetween about 0.8 μm to about 4.0 μm. In some embodiments, a distancefrom the first inductor 504 through the first dielectric layer 503 tothe first substrate 502 is between about 1.0 μm to about 2.5 μm.

At 104, a second substrate 508 is formed over the first dielectric layer503, as illustrated in FIGS. 5-6. In some embodiments, a switch, asprovided herein, is understood with a formation as MOSFET or PNjunctions or BJT (not shown). In some embodiments, a switch, as providedherein, needs voltage bias control to switch on or off or be activatedor deactivated to at least one of selectively couple together portionsof a PGS or to selectively couple one or more portions of a PGS to avoltage source. In some embodiments, a second semiconductor composite551 comprising glue oxide 506, the second substrate 508, and a thirdsubstrate 510, as illustrated in FIG. 5, is inverted and placed over thefirst semiconductor composite 550, to comprise a first semiconductorarraignment 555, as illustrated in FIG. 6. In some embodiments, at leastone of the first substrate 502, the second substrate 508 or the thirdsubstrate 510 have a thickness of between about 200 μm to about 700 μm.In some embodiments, at least one of the first substrate 502, the secondsubstrate 508, the third substrate 510 or other substrates mentionedherein comprise an epitaxial layer, a silicon-on-insulator (SOI)structure, a wafer, or a die formed from a wafer. In some embodiments,at least one of the first substrate 502, the second substrate 508, thethird substrate 510 or other substrates mentioned herein comprise atleast one of silicon, silicon-germanium (SiGe) or polysilicon. In someembodiments, the glue oxide 506 adheres the second substrate 508 to thefirst dielectric layer 503. In some embodiments, the glue oxide 106comprises an oxide. In some embodiments, the glue oxide 506 has athickness of between about 10 μm to about 40 μm.

In some embodiments, the second semiconductor composite 551, asillustrated in FIG. 5, is inverted and placed over a third semiconductorcomposite 450, as illustrated FIG. 7, where the third semiconductorcomposite 450 comprises the first substrate 502 and the first dielectriclayer 503, but without the first inductor 504 formed within the firstdielectric layer 503, to form a second semiconductor arraignment 454, asillustrated in FIG. 8.

In some embodiments, a fourth semiconductor composite 552, asillustrated in FIG. 9, comprises the glue oxide 506, the secondsubstrate 508, the third substrate 510 and a fourth substrate 512, whereshallow trench isolation (STI) regions 511 are formed within the fourthsubstrate 512. In some embodiments, the fourth substrate 512 is aportion of the second substrate 508 wherein STI regions 511 are notformed. The fourth semiconductor composite 552 is placed over the firstsemiconductor composite 550, illustrated in FIG. 4, to form a thirdsemiconductor arraignment 554, as illustrated in FIG. 10.

In some embodiments, the third substrate 510 and a portion of the secondsubstrate 508 are removed, such as with H₂ or He, as illustrated in FIG.11. In some embodiments, a horizontal or lateral fracture is introducedin the second substrate 508 to remove the portion of the secondsubstrate, such as where the portion of the second substrate 508 that isremoved corresponds to a portion of the second substrate 508 above thefracture in a direction away from the first substrate and towards thethird substrate 510. Although removal of the third substrate 510 and aportion of the second substrate 508 within the second semiconductorcomposite 551, as illustrated in FIG. 6, of the first semiconductorarraignment 555 is illustrated in FIG. 11, at least one of removal ofthe third substrate 510 and a portion of the second substrate 508 withinthe second semiconductor composite 551, as illustrated in FIG. 8, of thesecond semiconductor arraignment 454 or removal of the third substrate510 and a portion of the second substrate 508 within the fourthsemiconductor composite 552, as illustrated in FIG. 10, of the thirdsemiconductor arraignment 554 are contemplated, and resulting structuresuch as illustrated in FIG. 20, FIG. 34 and FIG. 46 indicate as much. Insome embodiments, after the third substrate 510 and a portion of thesecond substrate 508 are removed, the second substrate 508 has athickness of between about 200 μm to about 450 μm.

At 106, a first opening 514 is formed in the second substrate 508, asillustrated in FIG. 12. In some embodiments, the first opening 514descends to the glue oxide surface 515. In some embodiments, the firstopening 514 does not descend to the glue oxide surface 515. In someembodiments, the first opening 514 is formed by etching the secondsubstrate 508, where unetched portions of the first semiconductor device500 are masked off during the etching of the second substrate 508.

At 108, a first switch 516 is formed in the first opening 514, asillustrated in FIG. 13. In some embodiments, the first switch 516comprises a conductive material. In some embodiments, the first switch516 comprises at least one of metal or polysilicon. In some embodiments,the first switch 516 comprises at least one of copper or aluminum. Insome embodiments, the first switch 516 has a thickness between about 0.8μm to about 4.0 μm. In some embodiments, the first switch 516 has awidth between about 0.4 μm to about 1.0 μm.

At 110, a second dielectric layer 518 is formed over the first switch516 and the second substrate 508, as illustrated in FIG. 13. In someembodiments, the second dielectric layer 518 comprises one or morematerials comprised in the first dielectric layer 503 described above,such as illustrated in FIG. 4.

At 112, a second opening 520 and a third opening 521 are formed in thesecond dielectric layer 518 over the first switch 516, as illustrated inFIG. 14. In some embodiments, the second opening 520 and the thirdopening 521 are formed as described above with regard to the firstopening 514, such as illustrated in FIG. 12. In some embodiments, thesecond opening 520 and the third opening 521 descend to the surface ofthe first switch 516. In some embodiments, a diffusion barrier, such ascomprising an oxide liner, is formed in at least one of the secondopening 520 or the third opening 521. In some embodiments, the diffusionbarrier exists on sidewalls of the second dielectric layer 518 definingat least one of the second opening 520 or the third opening 521, such asafter a directional etch is performed to remove the diffusion barrierfrom a bottom of at least one of the second opening 520 or the thirdopening 521.

At 114, a first conductive element 522 is formed in the second opening520, as illustrated in FIG. 15. In some embodiments, a second conductiveelement 523 is formed in the third opening 521. In some embodiments, atleast one of the first conductive element 522 or the second conductiveelement 523 comprise a conductive material. In some embodiments, atleast one of the first conductive element 522 or the second conductiveelement 523 comprise metal. In some embodiments, at least one of thefirst conductive element 522 or the second conductive element 523comprise copper or aluminum. In some embodiments, at least one of thefirst conductive element 522 or the second conductive element 523 have athickness between about 2.0 μm to about 4.0 μm. In some embodiments, atleast one of the first conductive element or the second conductiveelement have a width between about 0.1 μm to about 0.4 μm.

At 116, a third dielectric layer 524 is formed over the first conductiveelement 522, the second conductive element 523, and the seconddielectric layer 518, as illustrated in FIG. 15. In some embodiments,the third dielectric layer 524 comprises one or more materials comprisedin the first dielectric layer 503 described above, such as illustratedin FIG. 4.

At 118, a fourth opening 526 is formed in the third dielectric layer 524over a least one of the first conductive element 522 or the secondconductive element 523, as illustrated in FIG. 16. In some embodiments,the fourth opening 526 is formed as described above with regard to thefirst opening 514, such as illustrated in FIG. 12.

At 120, a first portion of the PGS 528 is formed in the fourth opening526, as illustrated in FIG. 17. In some embodiments, the PGS 528 isdeposited. In some embodiments, the PGS 528 comprises a metal. In someembodiments, the PGS 528 comprises at least one of copper or aluminum.In some embodiments, the PGS 528 has a thickness of between about 0.8 μmto about 4.0 μm. In some embodiments, a portion of the PGS 528 has awidth of between about 0.4 μm to about 1.0 μm. In some embodiments, afirst portion of PGS 528 is coupled to the first switch 516, through thefirst conductive element 522 or the second conductive element 523. Insome embodiments, depending on a state of the first switch 516, such ason or off, the first switch 516 connects the a first portion of the PGS528 to a second portion of the PGS 528, altering the behavior of thefirst inductor 504. In some embodiments, depending on a state of thefirst switch 516, such as on or off, the first switch 516 applies avoltage to or conducts current to the first portion of the PGS 528,altering the behavior of the first inductor 504.

At 122, a second inductor 532 is formed on a fourth dielectric layer530, as illustrated in FIGS. 18-19. In some embodiments, the fourthdielectric layer 530 comprises one or more materials comprised in thefirst dielectric layer 503 described above, such as illustrated in FIG.4. In some embodiments, the fourth dielectric layer 530 is formed overthe PGS 528 and the third dielectric layer 524. In some embodiments, thesecond inductor 532 is formed as described above with regard to thefirst inductor 504, such as illustrated in FIG. 4.

In some embodiments, a second semiconductor device 600 comprises thesecond inductor 532 but not the first inductor 504, as illustrated inFIG. 20. In some embodiments, the second semiconductor device 600 isformed using 106-122 of the first method 100. In some embodiments, thesecond semiconductor device 600 is formed with the third semiconductorcomposite 450, as illustrated in FIG. 8, instead of the firstsemiconductor composite 550, as illustrated in FIG. 6, where the firstsemiconductor composite 550 is used to form the first semiconductordevice 500.

In some embodiments, a third semiconductor device (not shown) comprisesSTI regions 511, the first inductor 504 and the second inductor 532. Insome embodiments, the third semiconductor device is formed using 102-122of the first method 100. In some embodiments, the third semiconductordevice is formed with the fourth semiconductor composite 552, asillustrated in FIG. 9, in place of the second semiconductor composite551, as illustrated in FIG. 6. In some embodiments, PGS portions,switches, etc. are not formed in the STI regions 511.

In some embodiments, a fourth semiconductor device (not shown) comprisesSTI regions 511 and the second inductor, but not the first inductor. Insome embodiments, the fourth semiconductor device is formed using106-122 of the first method 100. In some embodiments, the fourthsemiconductor device is formed with the fourth semiconductor composite552, as illustrated in FIG. 9, in place of the second semiconductorcomposite 551, as illustrated in FIG. 6, and with the thirdsemiconductor composite 450, as illustrated in FIG. 7, instead of thefirst semiconductor composite 550, as illustrated in FIG. 6. In someembodiments, PGS portions, switches, etc. are not formed in the STIregions 511.

In some embodiments, any number of inductors, PGS portions or switchesare contemplated. Although not illustrated, any number of inductors areincluded in a semiconductor device, where at least one of the behaviorof an inductor or the interaction between multiple inductors is affectedby the selective coupling of portions of a PGS, such as by switcheswithin the semiconductor device. Although not illustrated, any number ofPGS portions are included in a semiconductor device where any number ofPGS portions are selectively coupled together. In some embodiments,first and second portions of a PGS are coupled to one another, whilethird and fourth portions of the PGS are coupled to one another. In someembodiments, first, second and third portions of a PGS are coupled toone another. Although not illustrated, any number of switches areincluded in a semiconductor device to at least one of selectively coupletogether any number of PGS portions or apply a current or voltage to anynumber of PGS portions, where the same or different current or voltageis applied to different PGS portions, in some embodiments. In someembodiments, a first switch couples a first portion of a PGS to a secondportion of the PGS, while a second switch applies a first current orvoltage to a third portion of the PGS and a third switch applies asecond current or voltage to a fourth portion of the PGS. In someembodiments, a first switch couples a first portion of a PGS to a secondportion of the PGS, while a second switch applies a first current orvoltage to at least one of the first portion of the PGS or the secondportion of the PGS. In some embodiments, switches are connected to PGSportions in any number of ways, such as through at least one of one ormore conductive elements, one or more interconnect metals or one or moreconductive traces.

A second method 300 of forming a fifth semiconductor device 700 isillustrated in FIG. 2, and one or more semiconductor arraignments formedby such methodology are illustrated in FIGS. 21-34. As illustrated inFIG. 34, the fifth semiconductor device 700 comprises one or moreportions of a patterned ground shielding (PGS) 728, a first inductor 704and a second switch 716 coupled to a first portion of the PGS 728.Turning to FIG. 21, a first substrate 702 is illustrated.

At 302, a fifth opening 714 is formed in the first substrate 702, asillustrated in FIG. 21. In some embodiments, the fifth opening 714 isformed as described above with regard to the first opening 514, such asillustrated in FIG. 12.

At 304, a second switch 716 is formed in the fifth opening 714, asillustrated in FIG. 22. In some embodiments, the second switch 716 isformed as described above with regard to the first switch 516, such asillustrated in FIG. 13.

At 306, a fifth dielectric layer 703 is formed over the second switch716 and the first substrate 702, as illustrated in FIG. 23. In someembodiments the fifth dielectric layer 703 comprises one or morematerials comprised in the first dielectric layer 503 described above,such as illustrated in FIG. 4.

At 308, a sixth opening 720 and a seventh opening 721 are formed in thefifth dielectric layer 703, as illustrated in FIG. 24. In someembodiments, the sixth opening 720 and the seventh opening 721 areformed as described above with regard to the first opening 514, such asillustrated in FIG. 12.

At 310, a third conductive element 722 is formed in the sixth opening720. In some embodiments, a fourth conductive element 723 is formed inthe seventh opening 721, as illustrated in FIG. 25. In some embodiments,the third conductive element 722 and the fourth conductive element 723are formed as described above with regard to the first conductiveelement 522, such as illustrated in FIG. 15.

At 312, a sixth dielectric layer 718 is formed over the third conductiveelement 722, the fourth conductive element 723 and the fifth dielectriclayer 703, as illustrated in FIG. 25. In some embodiments the sixthdielectric layer 718 comprises one or more materials comprised in thefirst dielectric layer 503 described above, such as illustrated in FIG.4.

At 314, an eighth opening 726 is formed in the sixth dielectric layer718, as illustrated in FIG. 26. In some embodiments, the eighth opening726 is formed as described above with regard to the first opening 514,such as illustrated in FIG. 12.

At 316, a first portion of the PGS 728 is formed in the eighth opening726, as illustrated in FIG. 27. In some embodiments, the PGS 728 isformed as described above with regard to the PGS 528, such asillustrated in FIG. 17.

At 318, a seventh dielectric layer 724 is formed over the first portionof the PGS 728 and the sixth dielectric layer 718, as illustrated inFIG. 28. In some embodiments the seventh dielectric layer 724 comprisesone or more materials comprised in the first dielectric layer 503described above, such as illustrated in FIG. 4.

At 320, a first inductor 704 is applied to the seventh dielectric layer724, as illustrated in FIG. 29. In some embodiments, the first inductor704 is formed as described above, such as illustrated in FIG. 4. In someembodiments, an eighth dielectric layer 730 is formed over the firstinductor 704, and a fifth semiconductor composite 650 is formed, asillustrated in FIG. 30. In some embodiments the eighth dielectric layer730 comprises one or more materials comprised in the first dielectriclayer 503 described above, such as illustrated in FIG. 4.

FIG. 31 illustrates the inversion and application of the secondsemiconductor composite 551, as illustrated in FIG. 6, to the fifthsemiconductor composite 650 to form a fourth semiconductor arraignment654.

FIG. 32 illustrates the removal of the third substrate 510 and a portionof the second substrate 508, such as illustrated in FIG. 11 and theformation of a ninth dielectric layer 734 over the remaining secondsubstrate 508. In some embodiments, the third substrate 510 and theportion of the second substrate 508 are removed as described above withregard to the first semiconductor device 500, such as illustrated inFIG. 11. In some embodiments the ninth dielectric layer 734 comprisesone or more materials comprised in the first dielectric layer 503described above, such as illustrated in FIG. 4.

FIG. 33 illustrates the formation of a ninth opening 736 in the ninthdielectric layer 734. In some embodiments, the ninth opening 736 isformed as described above with regard to the first opening 514, such asillustrated in FIG. 12.

FIG. 34 illustrates the formation of a first interconnect metal 738 inthe ninth opening 736. In some embodiments, the first interconnect metal738 comprises a conductive material. In some embodiments, the firstinterconnect metal 738 is formed by at least one of deposition orgrowth. In some embodiments, the first interconnect metal is formedcontemporaneously with the ninth dielectric layer 734. In someembodiments, a tenth dielectric layer 740 is formed over the firstinterconnect metal 738 and the ninth dielectric layer 734. In someembodiments, the tenth dielectric layer 740 comprises one or morematerials comprised in the first dielectric layer 503 described above,such as illustrated in FIG. 4. In some embodiments, a passivitationlayer 744 is formed over the tenth dielectric layer 740. In someembodiments, the passivation layer 744 comprises at least one of asilicon oxide (SiO₂) or silicon nitride (Si₃N₄). As described above,depending on a state of the second switch 716, such as on or off, thesecond switch 716 connects, through the third conductive element 722 andthe fourth conductive element 723, a first portion of the PGS 728 to asecond portion of the PGS 728, altering the behavior of the firstinductor 704. In some embodiments, depending on a state of the secondswitch 716, such as on or off, the second switch 716 applies a voltageto or conducts current to the first portion of the PGS 728, altering thebehavior of the first inductor 704.

A third method 400 of forming a sixth semiconductor device 800 isillustrated in FIG. 3, and one or more semiconductor arraignments formedby such methodology are illustrated in FIGS. 35-46. As illustrated inFIG. 46, the sixth semiconductor device 800 comprises the first inductor504, one or more portions of a patterned ground shielding (PGS) 828 anda third switch 816 coupled via an interconnect metal 843 to a firstportion of PGS 828. Turning to FIG. 35, the first semiconductorcomposite 550 is illustrated.

At 402, the first semiconductor composite 550 comprising the firstsubstrate 502, the first dielectric layer 503 and the first inductor 504embedded in the first dielectric layer 503 is formed, such describedabove with regard to 102 and as illustrated in FIG. 4.

At 404, a tenth opening 814 is formed in the first dielectric layer 503.In some embodiments, the tenth opening 814 is formed as described abovewith regard to the first opening 514, such as illustrated in FIG. 12.

At 406, a first portion of the PGS 828 is formed in the tenth opening814, as illustrated in FIG. 36. In some embodiments, the PGS 828 isformed as described above with regard to the PGS 528, such asillustrated in FIG. 17.

At 408, an eleventh dielectric layer 824 is formed over the firstportion of the PGS 828 and the second dielectric layer 503, asillustrated in FIG. 37. In some embodiments the eleventh dielectriclayer 824 comprises one or more materials comprised in the firstdielectric layer 503 described above, such as illustrated in FIG. 4. Insome embodiments, a sixth semiconductor composite 754 is formed.

At 410, a second substrate 508 is formed over the sixth semiconductorcomposite 754 and thereby over the eleventh dielectric layer 824, asillustrated in FIG. 38. In some embodiments, the second semiconductorcomposite 551, as illustrate in FIG. 5, is inverted and applied to thesixth semiconductor composite 754 forming a fifth semiconductorarraignment 750. In some embodiments, the third substrate 510 and aportion of the second substrate 508 are removed, as illustrated in FIG.39. In some embodiments, the third substrate 510 and the portion of thesecond substrate 508 are removed as described above with regard to thefirst semiconductor device 500, such as illustrated in FIG. 11.

At 412, an eleventh opening 826 is formed through the second substrate508, the glue oxide 506, and the eleventh dielectric layer 824 over thefirst portion of the PGS 828, as illustrated in FIG. 40. In someembodiments, the eleventh opening 826 is formed as described above withregard to the first opening 514, such as illustrated in FIG. 12.

At 414, a fifth conductive element 829 is formed in the eleventh opening826, as illustrated in FIG. 41. In some embodiments, the fifthconductive element 829 is formed as described above with regard to thefirst conductive element 522, such as illustrated in FIG. 15.

At 416, a twelfth opening 820 is formed through the second substrate508, as illustrated in FIG. 40. In some embodiments, the twelfth opening820 is formed as described above with regard to the first opening 514,such as illustrated in FIG. 12.

At 418, a third switch 816 is formed in the twelfth opening 820, asillustrated in FIG. 42. In some embodiments, the third switch 816 isformed as described above with regard to the first switch 516, such asillustrated in FIG. 13.

At 420, a twelfth dielectric layer 834 is formed over the secondsubstrate 508, the fifth conductive element 829 and the third switch816, as illustrated in FIG. 43. In some embodiments the twelfthdielectric layer 834 comprises one or more materials comprised in thefirst dielectric layer 503 described above, such as illustrated in FIG.4.

At 422, a thirteenth opening 836 is formed over the third switch 816,and at 426, a fourteenth opening 837 is formed over the fifth conductiveelement 829 in the twelfth dielectric layer 834, as illustrated in FIG.43. In some embodiments, the thirteenth opening 836 and the fourteenthopening 837 are formed as described above with regard to the firstopening 514, such as illustrated in FIG. 12.

At 424, a sixth conductive element 838 is formed in the thirteenthopening 836, and at 428, a seventh conductive element 839 is formed inthe fourteenth opening 837, as illustrated in FIG. 44. In someembodiments, the sixth conductive element 838 and the seventh conductiveelement 839 are formed as described above with regard to the firstconductive element 522, such as illustrated in FIG. 15.

At 430, a thirteenth dielectric layer 840 is formed over the twelfthdielectric layer 834, the sixth conductive element 838 and the seventhconductive element 839, as illustrated in FIG. 45. In some embodimentsthe thirteenth dielectric layer 840 comprises one or more materialscomprised in the first dielectric layer 503 described above, such asillustrated in FIG. 4.

At 432, a second interconnect metal 843 is formed that couples the sixthconductive element 838 to the seventh conductive element 839, asillustrated in FIG. 46. In some embodiments, the second interconnectmetal 843 is formed as described above with regard to the firstinterconnect metal 738, such as illustrated in FIG. 34. In someembodiments, a sixteenth opening 842 is formed in the thirteenthdielectric layer 840 that extends between the sixth conductive element838 and the seventh conductive element 839, as illustrated in FIG. 45.In some embodiments, the second interconnect metal 843 is formed in thesixteenth opening 842. In some embodiments, a fourteenth dielectriclayer 846 is formed over the second interconnect metal 843 and thethirteenth dielectric layer 840. In some embodiments the fourteenthdielectric layer 846 comprises one or more materials comprised in thefirst dielectric layer 503 described above, such as illustrated in FIG.4. In some embodiments, a passivation layer 844 is formed over thefourteenth dielectric layer 846, as illustrated in FIG. 46. In someembodiments, depending on a state of the third switch 816, such as on oroff, the third switch 816 applies, through the sixth conductive element838, the second interconnect metal 843, the seventh conductive element839 and the fifth conductive element 829, a voltage to or conductscurrent to the first portion of the PGS 828, altering the behavior ofthe first inductor 504.

In some embodiments, a semiconductor device comprises a first inductor,a PGS proximate the inductor, the PGS comprising one or more portions,and a first switch configured to couple a first portion of the PGS to asecond portion of the PGS.

In some embodiments, a method of forming a semiconductor comprisesforming a first switch to couple a first portion of a PGS to a secondportion of the PGS.

In some embodiments, a semiconductor device comprises a first inductoron a first side of a PGS, a second inductor on a second side of the PGSand a first switch configured to couple a first portion of the PGS to asecond portion of the PGS.

Although the subject matter has been described in language specific tostructural features or methodological acts, it is to be understood thatthe subject matter of the appended claims is not necessarily limited tothe specific features or acts described above. Rather, the specificfeatures and acts described above are disclosed as embodiment forms ofimplementing at least some of the claims.

Various operations of embodiments are provided herein. The order inwhich some or all of the operations are described should not beconstrued to imply that these operations are necessarily orderdependent. Alternative ordering will be appreciated having the benefitof this description. Further, it will be understood that not alloperations are necessarily present in each embodiment provided herein.Also, it will be understood that not all operations are necessary insome embodiments.

It will be appreciated that layers, features, elements, etc. depictedherein are illustrated with particular dimensions relative to oneanother, such as structural dimensions or orientations, for example, forpurposes of simplicity and ease of understanding and that actualdimensions of the same differ substantially from that illustratedherein, in some embodiments. Additionally, a variety of techniques existfor forming the layers features, elements, etc. mentioned herein, suchas etching techniques, implanting techniques, doping techniques, spin-ontechniques, sputtering techniques such as magnetron or ion beamsputtering, growth techniques, such as thermal growth or depositiontechniques such as chemical vapor deposition (CVD), physical vapordeposition (PVD), plasma enhanced chemical vapor deposition (PECVD), oratomic layer deposition (ALD), for example.

Moreover, “exemplary” is used herein to mean serving as an example,instance, illustration, etc., and not necessarily as advantageous. Asused in this application, “or” is intended to mean an inclusive “or”rather than an exclusive “or”. In addition, “a” and “an” as used in thisapplication and the appended claims are generally be construed to mean“one or more” unless specified otherwise or clear from context to bedirected to a singular form. Also, at least one of A and B and/or thelike generally means A or B or both A and B. Furthermore, to the extentthat “includes”, “having”, “has”, “with”, or variants thereof are used,such terms are intended to be inclusive in a manner similar to the term“comprising”. Also, unless specified otherwise, “first,” “second,” orthe like are not intended to imply a temporal aspect, a spatial aspect,an ordering, etc. Rather, such terms are merely used as identifiers,names, etc. for features, elements, items, etc. For example, a firstelement and a second element generally correspond to element A andelement B or two different or two identical elements or the sameelement.

Also, although the disclosure has been shown and described with respectto one or more implementations, equivalent alterations and modificationswill occur to others skilled in the art based upon a reading andunderstanding of this specification and the annexed drawings. Thedisclosure comprises all such modifications and alterations and islimited only by the scope of the following claims. In particular regardto the various functions performed by the above described components(e.g., elements, resources, etc.), the terms used to describe suchcomponents are intended to correspond, unless otherwise indicated, toany component which performs the specified function of the describedcomponent (e.g., that is functionally equivalent), even though notstructurally equivalent to the disclosed structure. In addition, while aparticular feature of the disclosure may have been disclosed withrespect to only one of several implementations, such feature may becombined with one or more other features of the other implementations asmay be desired and advantageous for any given or particular application.

1. A semiconductor device, comprising: an inductor; a patterned groundshielding (PGS) proximate the inductor, the PGS comprising a firstportion and a second portion; and a switch for electrically coupling thefirst portion of the PGS to the second portion of the PGS.
 2. Thesemiconductor device of claim 1, the PGS situated between the inductorand a second inductor.
 3. The semiconductor device of claim 1, the PGSsituated between the inductor and a substrate.
 4. The semiconductordevice of claim 1, the PGS situated between the first inductor and afirst substrate.
 5. The semiconductor device of claim 1, the PGSsituated between a first substrate and a second substrate.
 6. (canceled)7. The semiconductor device of claim 1, the switch not situated betweenthe inductor and the PGS.
 8. The semiconductor device of claim 1, theswitch situated in a substrate.
 9. The semiconductor device of claim 1,comprising: a conductive element connecting the switch to the firstportion of the PGS.
 10. The semiconductor device of claim 5, theconductive element passing through a second substrate.
 11. Thesemiconductor device of claim 1, comprising a second switch forelectrically coupling the first portion of the PGS to a voltage source.12. The semiconductor device of claim 11, the voltage source comprisingground. 13.-23. (canceled)
 24. A semiconductor device, comprising: aninductor on a first side of a patterned ground shielding (PGS); a secondinductor on a second side of the PGS; and a switch configured to couplea first portion of the PGS to a second portion of the PGS.
 25. Thesemiconductor device of claim 24, comprising a second switch configuredto couple the first portion of the PGS to a voltage source.
 26. Thesemiconductor device of claim 24, comprising: a composite comprising theinductor, the PGS, and the switch; a second composite comprising thesecond inductor; and a glue oxide situated between the composite and thesecond composite.
 27. A semiconductor device, comprising: an inductor; apattern ground shield (PGS) comprising a first portion and a secondportion; a dielectric layer situated between the inductor and the PGS; aswitch; a second dielectric layer situated between the switch and thePGS; and a first conductive element extending through the seconddielectric layer from the first portion of the PGS to the switch and asecond conductive element extending through the second dielectric layerfrom the second portion of the PGS to the switch.
 28. The semiconductordevice of claim 27, comprising: a second inductor, the PGS situatedbetween the inductor and the second inductor.
 29. The semiconductordevice of claim 27, comprising: a second inductor, the switch situatedbetween the PGS and the second inductor.
 31. The semiconductor device ofclaim 27, comprising: a second inductor and an oxide layer, the oxidelayer situated between the switch and the second inductor.
 32. Thesemiconductor device of claim 31, the oxide layer comprising a glueoxide.
 33. The semiconductor device of claim 27, comprising a dielectricregion situated between the first portion of the PGS and the secondportion of the PGS.